捕获的数据包括类型和点的距离及重合闸数。若电压源来自于开口电压,测距元件将不包含类型及位置。如果想要在报告中包括持续时间,用户就必须投入并配置每个断路器电弧电流特性。报告是基于每–相基准。触发可以是任何的操作数,但对于大多数的应用来讲,希望同一的操作数,如虚拟输出,用来驱动输出继电器跳开开关。为了防止事件的覆盖,扰动元件不应用来触发报告。当报告被触发时,报告触发事件将会自动产生。
Luxtron End Point Monitor
GASONICS 95-2421 LIGHT BOX ASSEMBLY
UNIT O3 DESTRUCT,30 SLPM AMAT 0190-03012 REV B
VAT 012-002740-1R GATE VALVE REFURB
APPLIED MATERIALS ANALOG INTERFACE UNIT PN#01-81912-00
Tegal PN 40-294-003D Plasma Etch, Ceramic Ring, Lower
TEL TOKYO ELECTRON 1181-000253-1B PCB ASSY MC-31044A
NOAH CONTROLLER TEL RCM VRS 21 NOAH EMO/COMMUNICATION C
NOAH CONTROLLER TEL RCM VRS 21 & NOAH EMO/COMM CABLE AS
NOAH CONTROLLER TEL RCM VRS 21 NOAH EMO/COMMUNICATION C
NOAH CONTROLLER TEL RCM VRS 21 NOAH EMO/COMMUNICATION C
ENI PL-2HF PLASMALOC LOW FREQUENCY GENERATOR
RORZE ROBOTS UST81126R ROBOT SANYO DENKI MOTOR RR304L1
APPLIED MATERIALS 0040-33264 HOLDER LEFT LL MULTI-SLOT
Tegal Plasma Etch, Electrode, Lower PN 39-735-002 Rev M
ENI OEM-6A-02 RF GENERATOR
ENI OEM-12B3-02 3-PHASE RF GENERATOR
LAM LOWER MATCH BOX CONTROLLER 853-480133-001
SENSARRAY CORPORATION 1840A-8-5063 Sensarray Wafer 17
SEIKO SEIKI STP 301 TURBOMOLECULAR PUMP VARIAN PART 9
Shimadzu Turbo Pump- TMP 280-L