继电器启动时,继电器会自动准备好参数列表。所有可能的模拟测量实际值参数见附录A。灵活逻辑参数。任何表中所列的参数索引列表用来使继电器显示参数的选择更为快速。如果通过继电器键盘1 显示来流览整个参数列表将是非常费时的,通过继电器键盘输入这个索引号可以令相应的参数显示出来。CTIVT上的8个通道都存储在录波文件中, 模块通道在文件中的名称如下:<插槽位号><端子号>- .<| 或V><A. B或C相,或第4个输入>
APPLIED EPI PN 301487 GASKET-FACE, SLIT-VALVE,
Lambda MX 13150
VEECO PROCESS METOR PN 304654
Tokyo Electron Heater, 2 TR0803 DS043-001614-1
TEL TOKYO ELECTRON 1181-000337-19 PCB ASSY MC31049-2
TD370/400 TURBO VACUUM PUMP CONTROLLER
GLASSMAN POWER SUPPLY PSWG-20P-15-M3
TEL TOKYO ELECTRON 1181-000465-12 PCB ASSY MC 31109A,D/
TEL TOKYO ELECTRONIC 1181-000537-15 PCB ASSY MC 31106A
EDWARDS ACTIVE GAUGE CONTROLLER D38661000
TEL TOKYO ELECTRON 1181-000538-12 PCB ASSY MC-31107A D/
Domnick Hunter 040AR O Ring Kit 4-Oil X Evolution 50 4
Domnick Hunter 040AR O Ring Kit 4-Oil X Evolution 50 4
AMAT 0200-04235 ISOLATOR 0200-04235 CERAMIC
VERITY INSTRUMENTS EP1001 SYSTEM CONTROLLER 100-240V
VERITY INSTRUMENTS EP1001 SYSTEM CONTROLLER 100-260V
Mactronix-Eureka IIISR – UKA 650 Wafer Transfer Units
Mactronix-Eureka UKA 650A3 Wafer Transfer Unit
Mactronix Wafer Transfer Unit – Wafer Handler
Bruce 7660 BoatLoad Control modules BTI Furnace
APPLIED MATERIALS 0020-30797 PERFORATED PLATE SHOWER HE