这个部分允许继电器中用户定制的对灵活逻辑操作数状态的存取。状态位是这样打包的,以便于16个状态可以在一个Modbus寄存器中读出来。状态位可以这们配置,以便于所有的用户感兴趣的状态量在最少的Modbus寄存器中是可用的。
Eaton PN 17A8076 6″ Partition Plate
UNIT MASS FLOW CONTROLLER 300SCCM GAS-SiH4 PN#1200A-102
Tegal Plasma Etch OPTICAL FILTER – 901E CELL- A
Tegal Plasma Etch OPTICAL FILTER – 903E CELL- A
GAT, INC GMC1000-6
APPLIED MATERIALS 0200-20499 COVER,WIDE BODY QTZ WINDOW
Semitool 245004-503 Fiber Optic Board Receiver
Mallory CGS373UO75X5L 658-9533-757 – 37,000 uf 75 VDC
MILLIPORE WPRV200SI FILTER INERT GASES PURIFIER WAFERP
Littelfuse FLSR 250ID 600 Volt
VARIAN 17118520 BLOCK,POLE LONG ES QUAD VG
Turck Bi1-EG05-AN6X Switch Set/Censor, M5 x 0.5,
Integrated Power Designs PN SRW-300-1004 VIN: 100-120/2
OMRON Time Counter PN H7ET-NFV1-B
TAMZO E0R05-17895A PULSE GENARATE CONTROL BOARD
VEECO PROCESS METR 192618 SENSOR, STAGE LIFT POSITION
THK LM Sys. PN RSR15WUU1+310L1 Linear Guide SN A7B6-771
Plast-O-Matic Valves Inc. GGMT060-PV PVC Molded Guage
APPLIED MATERIALS 0021-07079 COVER CATHODE LINER COOLIN
APPLIED INDUSTRIAL GASKET RING 503308-LOT OF 10