用户可编程按钮要求有-个HP型的继电器面板。如果单独定购HP型的面板，继电器的定货码必须改变以表明HP面板。这可以通过EnerVista UR安装的鳙护>启用按钮命令。这个部分提供了一个机构,在其中任何256个选中的灵活逻辑操作数状态可以用于有效的监控。
HK-15A-5 P C BOARD PUV-810C39-0073W227
Eaton PN 17121930 Rev A Tzm Rep. Cathode Side
Sunx CX-22-PN-J Photo Electric Sensor
GENUS INC 42279-03 PCB VAC CONTROLLER FRONT PANEL REV B
SCB4275B PCB REV C
AXCELIS 17111860 TUBE FLANGE (S ,GRAPHITE TUBE V
APPLIED CERAMICS 911-02075A AEP RING COMPOSITE RETAINI
BRUCE BTI 7351C BTI 7351C CONTROLLERS 9760400
MKS 225AD-00010AAB 10 TORR
Semitool 72015-23 Asahi/America Pneumatic Valve Model A
AMAT 0020-21677 BUSHING INNER MGN C REV D 2-10968000-0
Tegal PN 80-200-314 Plasma Etch 9xx, CAM FOLLOWER 1/2OD
Eaton Graphite GSD Shield PN 17128250
COSEL PBA600F-24 POWER SUPPLY
SMC Corp. MQQTB10-15D Compact Cylinder, Metal Seal, Low
SMC Corp. PN MGPM12-50 Compact Guide Cylinder
SQUARE D KAL26225-1127 Series 2 225A THERMAL-MAGNETIC C
VARIAN BB10158038 PLATE RETAINER PIN PLATE
Eaton PN 17A8076 6″ Partition Plate
UNIT MASS FLOW CONTROLLER 300SCCM GAS-SiH4 PN#1200A-102
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