描述
STEC MFC SEC-4400M, O2, SiH4, Ar, BCl3, Cl2, used
Thermo Neslab M25 chiller, used, as is
Novellus 02-105005-00 ASSY,MC,P166,W/8 RS232 controller
EDWARDS DP80 Dry Vacuum Pump, used, as is
ENI OEM-25A-21091-51 RF Generator, 2500 W, 13.56 MHz,
RFPP RF Generator ICP-20P Model# 8511139050, 2000 W
Advanced Energy PDW 600, AE 3156014 Lam # 853-15516-003
ENI OEM-12B-07 RF Generator, 1200W at 13.56 MHz